Research Article
Corrosion Resistance of DLC Film-Coated SUS316L Steel Prepared by Ion Beam Enhanced Deposition
Figure 5
EPMA mappings of carbon element and EPMA line scans of carbon intensity of the DLC film cross section deposited at (a) and (b) CH4/H2 = 1 : 1, 6 h; (c) and (d) CH4/H2 = 1 : 1, 12 h; (e) and (f) CH4/H2 = 1 : 0, 6 h; (g) and (h) CH4/H2 = 1 : 0, 12 h.
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