Corrosion Resistance of DLC Film-Coated SUS316L Steel Prepared by Ion Beam Enhanced Deposition

<table class="table-group" id="tab1"><tr><td><table class="table"><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr class="thead"><td class="align_left">Substrate</td><td class="align_center" colspan="4">SUS316L</td></tr><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr><td class="align_left">CH<sub>4</sub>/H<sub>2</sub></td><td class="align_center" colspan="2">1 : 1</td><td class="align_center" colspan="2">1 : 0</td></tr><tr><td class="align_left">Deposition time</td><td class="align_center">6 h</td><td class="align_center">12 h</td><td class="align_center">6 h</td><td class="align_center">12 h</td></tr><tr class="table-tr"><td colspan="5"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

<div>Parameters of various processing conditions.</div>

Advances in Materials Science and Engineering

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Table 1

Table 1: Corrosion Resistance of DLC Film-Coated SUS316L Steel Prepared by Ion Beam Enhanced Deposition 