Research Article

Corrosion Resistance of DLC Film-Coated SUS316L Steel Prepared by Ion Beam Enhanced Deposition

Table 3

ICR for SUS316L and DLC coatings deposited under different conditions.

SubstrateCH4/H2 = 1 : 1CH4/H2 = 1 : 1CH4/H2 = 1 : 0CH4/H2 = 1 : 0
6 h12 h6 h12 h

ICR (mΩ·cm2)3523.712.9105.979.9