Pull-In and Snap-Through Analysis of Electrically Actuated Viscoelastic Curved Microbeam

<table class="table-group" id="tab4"><tr><td><table class="table"><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr class="thead"><td class="align_left" rowspan="2">Voltage range<svg height="10.1524pt" id="M62" style="vertical-align:-0.04990005pt" version="1.1" viewbox="-0.0498162 -10.1025 6.17869 10.1524" width="6.17869pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.0091,0,0,-0.0091,0,-5.741)"><path d="M486 158C486 177 478 202 466 220C413 228 386 236 336 262C386 288 413 297 466 304C478 323 486 347 485 366C470 376 444 381 422 380C389 338 368 319 321 288C323 345 329 372 349 422C339 442 322 461 305 470C289 461 271 442 262 422C281 372 287 345 290 288C243 319 222 338 189 380C167 381 142 376 125 366C125 347 133 322 145 304C198 296 225 288 275 262C225 236 198 227 145 220C133 201 125 177 126 158C141 148 167 143 189 144C222 186 243 205 290 236C288 179 282 152 262 102C272 82 289 63 306 54C322 63 340 82 350 102C330 152 324 179 321 236C368 205 390 186 422 144C444 143 470 148 486 158Z"></path></g></svg></td><td class="align_center" colspan="2">Instantaneous</td><td class="align_center" colspan="2">Durable</td></tr><tr class="thead"><td class="align_center">Position</td><td class="align_center">Shape</td><td class="align_center">Position</td><td class="align_center">Shape</td></tr><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr><td class="align_left"><span style="width: 62.2716ptpx;"><svg height="15.7176pt" id="M63" style="vertical-align:-3.9435pt" version="1.1" viewbox="-0.0498162 -11.7741 62.2716 15.7176" width="62.2716pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M241 635C89 635 35 457 35 312C35 153 89 -12 240 -12C390 -12 443 166 443 312C443 466 390 635 241 635ZM238 602C329 602 354 454 354 312C354 172 330 22 240 22C152 22 124 173 124 313S148 602 238 602Z"></path></g><g transform="matrix(.013,0,0,-0.013,9.872,0)"><path d="M512 -3V55L134 254V256L512 456V514L75 281V230L512 -3Z"></path></g><g transform="matrix(.013,0,0,-0.013,21.135,0)"><path d="M697 650H468L461 623L492 619C539 613 547 605 518 546C481 471 367 264 278 116H276C239 278 197 500 186 567C180 604 185 613 226 619L252 623L260 650H24L17 623C78 617 92 613 108 533L216 -11H247C365 200 515 462 560 529C616 612 624 615 689 623L697 650Z"></path></g><g transform="matrix(.013,0,0,-0.013,33.991,0)"><path d="M512 -3V55L134 254V256L512 456V514L75 281V230L512 -3Z"></path></g><g transform="matrix(.013,0,0,-0.013,45.254,0)"><path d="M697 650H468L461 623L492 619C539 613 547 605 518 546C481 471 367 264 278 116H276C239 278 197 500 186 567C180 604 185 613 226 619L252 623L260 650H24L17 623C78 617 92 613 108 533L216 -11H247C365 200 515 462 560 529C616 612 624 615 689 623L697 650Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,54.478,-5.741)"><path d="M786 370C786 572 637 650 431 650H137L130 618C217 606 220 603 204 519L129 127C115 48 107 39 26 30L18 0H270C410 0 516 20 609 75C722 140 786 240 786 370ZM683 373C683 178 547 40 323 40C298 40 264 40 241 45C213 51 207 64 220 127L295 545C304 582 309 595 320 601C335 610 367 613 406 613C570 613 683 538 683 373Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,52.586,3.784)"><path d="M463 633C453 636 427 644 417 648C388 660 349 667 316 667C183 667 100 592 100 483C100 398 176 335 223 305L259 282C321 242 358 203 358 149C358 66 301 22 234 22C110 22 70 131 57 208L24 205L28 48C51 23 128 -17 215 -17C342 -17 446 60 446 174C446 262 394 310 317 361L284 383C229 420 183 455 183 515C183 569 222 628 298 628C384 628 418 563 428 481L461 487C459 527 458 593 463 633Z"></path></g></svg></span></td><td class="align_center">Stable 1</td><td class="align_center"><object data="https://static.hindawi.com/articles/amse/volume-2020/9107323/figures/9107323.tab-inline.001.svgz" name="9107323.tab-inline.001" type="image/svg+xml"></object></td><td class="align_center">Stable 1</td><td class="align_center"><object data="https://static.hindawi.com/articles/amse/volume-2020/9107323/figures/9107323.tab-inline.002.svgz" name="9107323.tab-inline.002" type="image/svg+xml"></object></td></tr><tr><td class="align_left"><span style="width: 69.7221ptpx;"><svg height="15.7176pt" id="M64" style="vertical-align:-3.9435pt" version="1.1" viewbox="-0.0498162 -11.7741 69.7221 15.7176" width="69.7221pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M697 650H468L461 623L492 619C539 613 547 605 518 546C481 471 367 264 278 116H276C239 278 197 500 186 567C180 604 185 613 226 619L252 623L260 650H24L17 623C78 617 92 613 108 533L216 -11H247C365 200 515 462 560 529C616 612 624 615 689 623L697 650Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,9.224,-5.741)"><path d="M786 370C786 572 637 650 431 650H137L130 618C217 606 220 603 204 519L129 127C115 48 107 39 26 30L18 0H270C410 0 516 20 609 75C722 140 786 240 786 370ZM683 373C683 178 547 40 323 40C298 40 264 40 241 45C213 51 207 64 220 127L295 545C304 582 309 595 320 601C335 610 367 613 406 613C570 613 683 538 683 373Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,7.332,3.784)"><path d="M463 633C453 636 427 644 417 648C388 660 349 667 316 667C183 667 100 592 100 483C100 398 176 335 223 305L259 282C321 242 358 203 358 149C358 66 301 22 234 22C110 22 70 131 57 208L24 205L28 48C51 23 128 -17 215 -17C342 -17 446 60 446 174C446 262 394 310 317 361L284 383C229 420 183 455 183 515C183 569 222 628 298 628C384 628 418 563 428 481L461 487C459 527 458 593 463 633Z"></path></g><g transform="matrix(.013,0,0,-0.013,20.415,0)"><path d="M512 -3V55L134 254V256L512 456V514L75 281V230L512 -3Z"></path></g><g transform="matrix(.013,0,0,-0.013,31.678,0)"><path d="M697 650H468L461 623L492 619C539 613 547 605 518 546C481 471 367 264 278 116H276C239 278 197 500 186 567C180 604 185 613 226 619L252 623L260 650H24L17 623C78 617 92 613 108 533L216 -11H247C365 200 515 462 560 529C616 612 624 615 689 623L697 650Z"></path></g><g transform="matrix(.013,0,0,-0.013,44.534,0)"><path d="M512 -3V55L134 254V256L512 456V514L75 281V230L512 -3Z"></path></g><g transform="matrix(.013,0,0,-0.013,55.796,0)"><path d="M697 650H468L461 623L492 619C539 613 547 605 518 546C481 471 367 264 278 116H276C239 278 197 500 186 567C180 604 185 613 226 619L252 623L260 650H24L17 623C78 617 92 613 108 533L216 -11H247C365 200 515 462 560 529C616 612 624 615 689 623L697 650Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,65.02,-5.741)"><path d="M418 650H141L133 618C225 611 232 604 218 531L141 120C126 45 119 37 33 32L24 0H301L308 32C220 37 214 44 227 120L305 531C319 605 325 611 411 618L418 650Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,63.128,3.784)"><path d="M622 479C622 589 545 650 400 650H146L140 618C229 609 230 602 215 527L135 132C117 43 112 41 27 32L18 0H305L313 32C213 40 205 44 222 132L251 284L324 262H365C484 269 622 333 622 479ZM528 477C528 356 420 305 344 305C300 305 276 314 259 321L303 554C311 597 313 600 331 606C345 611 361 614 379 614C463 614 528 580 528 477Z"></path></g></svg></span></td><td class="align_center">Stable 1</td><td class="align_center"><object data="https://static.hindawi.com/articles/amse/volume-2020/9107323/figures/9107323.tab-inline.003.svgz" name="9107323.tab-inline.003" type="image/svg+xml"></object></td><td class="align_center">Stable 2</td><td class="align_center"><object data="https://static.hindawi.com/articles/amse/volume-2020/9107323/figures/9107323.tab-inline.005.svgz" name="9107323.tab-inline.005" type="image/svg+xml"></object></td></tr><tr><td class="align_left"><span style="width: 69.7221ptpx;"><svg height="15.7176pt" id="M65" style="vertical-align:-3.9435pt" version="1.1" viewbox="-0.0498162 -11.7741 69.7221 15.7176" width="69.7221pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M697 650H468L461 623L492 619C539 613 547 605 518 546C481 471 367 264 278 116H276C239 278 197 500 186 567C180 604 185 613 226 619L252 623L260 650H24L17 623C78 617 92 613 108 533L216 -11H247C365 200 515 462 560 529C616 612 624 615 689 623L697 650Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,9.224,-5.741)"><path d="M418 650H141L133 618C225 611 232 604 218 531L141 120C126 45 119 37 33 32L24 0H301L308 32C220 37 214 44 227 120L305 531C319 605 325 611 411 618L418 650Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,7.332,3.784)"><path d="M463 633C453 636 427 644 417 648C388 660 349 667 316 667C183 667 100 592 100 483C100 398 176 335 223 305L259 282C321 242 358 203 358 149C358 66 301 22 234 22C110 22 70 131 57 208L24 205L28 48C51 23 128 -17 215 -17C342 -17 446 60 446 174C446 262 394 310 317 361L284 383C229 420 183 455 183 515C183 569 222 628 298 628C384 628 418 563 428 481L461 487C459 527 458 593 463 633Z"></path></g><g transform="matrix(.013,0,0,-0.013,17.318,0)"><path d="M512 -3V55L134 254V256L512 456V514L75 281V230L512 -3Z"></path></g><g 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264 40 241 45C213 51 207 64 220 127L295 545C304 582 309 595 320 601C335 610 367 613 406 613C570 613 683 538 683 373Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,60.032,3.784)"><path d="M622 479C622 589 545 650 400 650H146L140 618C229 609 230 602 215 527L135 132C117 43 112 41 27 32L18 0H305L313 32C213 40 205 44 222 132L251 284L324 262H365C484 269 622 333 622 479ZM528 477C528 356 420 305 344 305C300 305 276 314 259 321L303 554C311 597 313 600 331 606C345 611 361 614 379 614C463 614 528 580 528 477Z"></path></g></svg></span></td><td class="align_center">Stable 2</td><td class="align_center"><object data="https://static.hindawi.com/articles/amse/volume-2020/9107323/figures/9107323.tab-inline.004.svgz" name="9107323.tab-inline.004" type="image/svg+xml"></object></td><td class="align_center">Stable 2</td><td class="align_center"><object data="https://static.hindawi.com/articles/amse/volume-2020/9107323/figures/9107323.tab-inline.007.svgz" name="9107323.tab-inline.007" type="image/svg+xml"></object></td></tr><tr><td class="align_left"><span style="width: 69.7221ptpx;"><svg height="15.608pt" id="M66" style="vertical-align:-3.833899pt" version="1.1" viewbox="-0.0498162 -11.7741 69.7221 15.608" width="69.7221pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M697 650H468L461 623L492 619C539 613 547 605 518 546C481 471 367 264 278 116H276C239 278 197 500 186 567C180 604 185 613 226 619L252 623L260 650H24L17 623C78 617 92 613 108 533L216 -11H247C365 200 515 462 560 529C616 612 624 615 689 623L697 650Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,9.224,-5.741)"><path d="M786 370C786 572 637 650 431 650H137L130 618C217 606 220 603 204 519L129 127C115 48 107 39 26 30L18 0H270C410 0 516 20 609 75C722 140 786 240 786 370ZM683 373C683 178 547 40 323 40C298 40 264 40 241 45C213 51 207 64 220 127L295 545C304 582 309 595 320 601C335 610 367 613 406 613C570 613 683 538 683 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transform="matrix(.013,0,0,-0.013,55.796,0)"><path d="M697 650H468L461 623L492 619C539 613 547 605 518 546C481 471 367 264 278 116H276C239 278 197 500 186 567C180 604 185 613 226 619L252 623L260 650H24L17 623C78 617 92 613 108 533L216 -11H247C365 200 515 462 560 529C616 612 624 615 689 623L697 650Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,65.02,-5.741)"><path d="M418 650H141L133 618C225 611 232 604 218 531L141 120C126 45 119 37 33 32L24 0H301L308 32C220 37 214 44 227 120L305 531C319 605 325 611 411 618L418 650Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,63.128,3.784)"><path d="M622 479C622 589 545 650 400 650H146L140 618C229 609 230 602 215 527L135 132C117 43 112 41 27 32L18 0H305L313 32C213 40 205 44 222 132L251 284L324 262H365C484 269 622 333 622 479ZM528 477C528 356 420 305 344 305C300 305 276 314 259 321L303 554C311 597 313 600 331 606C345 611 361 614 379 614C463 614 528 580 528 477Z"></path></g></svg></span></td><td class="align_center">Stable 2</td><td class="align_center"><object data="https://static.hindawi.com/articles/amse/volume-2020/9107323/figures/9107323.tab-inline.006.svgz" name="9107323.tab-inline.006" type="image/svg+xml"></object></td><td class="align_center">Pull-in</td><td class="align_center"><object data="https://static.hindawi.com/articles/amse/volume-2020/9107323/figures/9107323.tab-inline.008.svgz" name="9107323.tab-inline.008" type="image/svg+xml"></object></td></tr><tr class="table-tr"><td colspan="5"><hr class="tbody-hr"/></td></tr></table></td></tr><tr class="table-fn"><td><div><svg height="10.1524pt" id="M67" style="vertical-align:-0.04990005pt" version="1.1" viewbox="-0.0498162 -10.1025 6.17869 10.1524" width="6.17869pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.0091,0,0,-0.0091,0,-5.741)"><path d="M486 158C486 177 478 202 466 220C413 228 386 236 336 262C386 288 413 297 466 304C478 323 486 347 485 366C470 376 444 381 422 380C389 338 368 319 321 288C323 345 329 372 349 422C339 442 322 461 305 470C289 461 271 442 262 422C281 372 287 345 290 288C243 319 222 338 189 380C167 381 142 376 125 366C125 347 133 322 145 304C198 296 225 288 275 262C225 236 198 227 145 220C133 201 125 177 126 158C141 148 167 143 189 144C222 186 243 205 290 236C288 179 282 152 262 102C272 82 289 63 306 54C322 63 340 82 350 102C330 152 324 179 321 236C368 205 390 186 422 144C444 143 470 148 486 158Z"></path></g></svg>D: durable, I: instantaneous, S: snap-through, and P: pull-in.<br/></div></td></tr></table>

<div>The configuration of curved microbeam in instantaneous and durable states.</div>

Advances in Materials Science and Engineering

tab4

Table 4

Table 4: Pull-In and Snap-Through Analysis of Electrically Actuated Viscoelastic Curved Microbeam 