Investigation of Stereometric and Fractal Patterns of Spin-Coated LuMnO₃ Thin Films

Table 1

Height surface parameters of LuMnO₃ thin films, according to ISO 25178-2:2012.

Parameter	Unit	LuMnO650	LuMnO750	LuMnO850
Height
Sq	(nm)	0.30 ± 0.03	0.61 ± 0.35	2.48 ± 0.53
Ssk	(—)	0.33 ± 0.15	0.39 ± 0.43	0.22 ± 0.08
Sku	(—)	3.60 ± 0.31	4.24 ± 1.37	3.17 ± 0.45
Sp	(nm)	1.38 ± 0.21	2.78 ± 1.86	8.23 ± 0.82
Sv	(nm)	1.18 ± 0.16	2.62 ± 0.95	9.09 ± 1.94
Sz	(nm)	2.56 ± 0.18	5.40 ± 2.80	17.27 ± 2.32
Sa	(nm)	0.24 ± 0.02	0.45 ± 0.22	1.81 ± 0.43

denotes samples without significant difference, ANOVA One-Way and Tukey Test ().