Investigation of Stereometric and Fractal Patterns of Spin-Coated LuMnO₃ Thin Films

Table 2

Stereometric parameters of the LuMnO₃ thin films, in accordance with ISO 25178-2:2012.

Parameter	Unit	LuMnO650	LuMnO750	LuMnO850
Functional
Smc	(nm)	0.39 ± 0.04	0.70 ± 0.32	3.04 ± 0.80
Sxp	(nm)	0.54 ± 0.05	1.10 ± 0.59	4.23 ± 0.57
Sk	(nm)	0.72 ± 0.07	1.23 ± 0.40	6.00 ± 1.69
Spk	(nm)	0.39 ± 0.05	0.98 ± 0.86	2.58 ± 0.20
Svk	(nm)	0.27 ± 0.04	0.60 ± 0.40	2.00 ± 0.30
Smr1	(%)	12.43 ± 0.85	11.87 ± 2.13	12.88 ± 0.68
Smr2	(%)	90.57 ± 0.88	88.70 ± 3.53	90.55 ± 2.62
Vmp	(μm^3/μm^2)	1.9e^−05 ± 2.8e^−06	5.1e^−05 ± 4.8e^−05	1.2e^−04 ± 8.6e^−06
Vmc	(μm^3/μm^2)	2.6e^−04 ± 2.8e^−05	4.7e^−04 ± 2.0e^−04	2.0e^−03 ± 5.3e^−04
Vvc	(μm^3/μm^2)	3.8e^−04 ± 4.0e^−05	6.8e^−04 ± 3.2e^−04	2.9e^−03 ± 7.9e^−04
Vvv	(μm^3/μm^2)	3.1e^−05 ± 3.3e^−06	6.8e^−05 ± 4.3e^−05	2.3e^−04 ± 2.7e^−05
Feature
Spd	(1/μm^2)	122.04 ± 12.04	53.56 ± 29.05	10.73 ± 2.78
Spc	(1/μm^2)	2.82 ± 0.08	3.73 ± 0.76	7.56 ± 0.16
Hybrid
Sdq	(—)	0.01 ± 0.00	0.02 ± 0.00	0.05 ± 0.01
Sdr	(%)	0.01 ± 0.00	0.02 ± 0.00	0.14 ± 2.78

denotes samples without significant difference, ANOVA One-Way and Tukey Test ().