An Alternative Simulation Method for Calculation of Microgas Flows under Flying Head Sliders

Figure 4

Comparison of the pressure distribution in a 1.2×40×4000𝜇m³ microchannel for helium from the solution of the degenerated (24) (solid line) with experimental data [31] (symbols) and the IP method [26] (dashed lines almost obstructed by the solid lines). 𝐾𝑛_𝑜 =0.15579.