High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM

Figure 5

Three-dimensional display of sodium secondary ions from the nickel finder grid shown in Figure 4. It can be seen that the sodium is concentrated in two locations, both at the surface of the sample. The tailing in the z direction may be due to the shape of the sodium deposit on the nickel grid or may also be in part due to ion-beam-induced roughening and mixing. The x and y dimensions are 20 μm as for Figure 4; the z dimension is unknown, but is orders of magnitude less than this. The view is of isointensity surfaces after thresholding to remove background counts.