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Advances in Materials Science and Engineering
Volume 2012, Article ID 923769, 7 pages
http://dx.doi.org/10.1155/2012/923769
Research Article

Characteristics and Photocatalytic Properties of T i O 2 Thin Film Prepared by Sputter Deposition and Post-N+ Ion Implantation

1Department of Electrical Engineering, Faculty of Engineering, Kogakuin University, 2665-1, Nakano-machi, Hachioji-shi, Tokyo 192-0015, Japan
2Division of Basic Liberal Arts, Kogakuin University, 2665-1, Nakano-machi, Hachioji-shi, Tokyo 192-0015, Japan
3Tokyo Metropolitan Industrial Technology Research Institute, 3-13-10, Nishigaoka, Kitaku, Tokyo 115-8586, Japan

Received 30 June 2011; Revised 5 September 2011; Accepted 12 September 2011

Academic Editor: Koumei Baba

Copyright © 2012 Haider A. Shukur et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. A. Fujishima and K. Honda, “Electrochemical photolysis of water at a semiconductor electrode,” Nature, vol. 238, no. 5358, pp. 37–38, 1972. View at Publisher · View at Google Scholar · View at Scopus
  2. R. Wang, K. Hashimoto, A. Fujishima et al., “Light-induced amphiphilic surfaces,” Nature, vol. 388, no. 6641, pp. 431–432, 1997. View at Publisher · View at Google Scholar · View at Scopus
  3. M. Anpo and M. Takeuchi, “The design and development of highly reactive titanium oxide photocatalysts operating under visible light irradiation,” Journal of Catalysis, vol. 216, no. 1-2, pp. 505–516, 2003. View at Publisher · View at Google Scholar · View at Scopus
  4. S. T. Martin, H. Herrmann, W. Choi, and M. R. Hoffmann, “Time-resolved microwave conductivity. Part 1.—TiO2 photoreactivity and size quantization,” Journal of the Chemical Society, Faraday Transactions, vol. 90, no. 21, pp. 3315–3322, 1994. View at Publisher · View at Google Scholar · View at Scopus
  5. T. Ihara, M. Miyoshi, M. Ando, S. Sugihara, and Y. Iriyama, “Preparation of a visible-light-active TiO2 photocatayst by RF plasma treatment,” Journal of materials science, vol. 36, no. 17, pp. 4201–4207, 2001. View at Google Scholar
  6. R. Asahi, T. Morikawa, T. Ohwaki, K. Aoki, and Y. Taga, “Visible-light photocatalysis in nitrogen-doped titanium oxides,” Science, vol. 293, no. 5528, pp. 269–271, 2001. View at Publisher · View at Google Scholar · View at PubMed · View at Scopus
  7. Y. Sakatani and H. Koike, Japan Patent P2001-72419A, 2001.
  8. S. K. Zheng, T. M. Wang, W. C. Hao, and R. Shen, “Improvement of photocatalytic activity of TiO2 thin film by Sn ion implantation,” Vacuum, vol. 65, no. 2, pp. 155–159, 2002. View at Publisher · View at Google Scholar · View at Scopus
  9. Y. Suda, H. Kawasaki, T. Ueda, and T. Ohshima, “Preparation of high quality nitrogen doped TiO2 thin film as a photocatalyst using a pulsed laser deposition method,” Thin Solid Films, vol. 453-454, pp. 162–166, 2004. View at Publisher · View at Google Scholar · View at Scopus
  10. K. Yang, Y. Dai, B. Huang, and S. Han, “Theoretical study of N-doped TiO2 rutile crystals,” Journal of Physical Chemistry B, vol. 110, no. 47, pp. 24011–24014, 2006. View at Publisher · View at Google Scholar · View at PubMed
  11. J. Graciani, L. J. Álvarez, J. A. Rodriguez, and J. F. Sanz, “N doping of rutile TiO2 (110) surface. A theoretical DFT study,” Journal of Physical Chemistry C, vol. 112, no. 7, pp. 2624–2631, 2008. View at Publisher · View at Google Scholar
  12. C. Di Valentin, G. Pacchioni, A. Selloni, S. Livraghi, and E. Giamello, “Characterization of paramagnetic species in N-doped TiO2 powders by EPR spectroscopy and DFT calculations,” Journal of Physical Chemistry B, vol. 109, pp. 11414–11419, 2005. View at Google Scholar
  13. S. Livraghi, A. M. Czoska, M. C. Paganini, and E. Giamello, “Preparation and spectroscopic characterization of visible light sensitized N doped TiO2 (rutile),” Journal of Solid State Chemistry, vol. 182, no. 1, pp. 160–164, 2009. View at Publisher · View at Google Scholar · View at Scopus
  14. R. Fernandes, N. Patel, R. Dholam, M. Adami, and A. Miotello, “Low energy ion-beam modification of TiO2 photocatalyst thin film for visible light absorption,” Surface and Coatings Technology, vol. 203, no. 17-18, pp. 2579–2583, 2009. View at Publisher · View at Google Scholar · View at Scopus
  15. S. K. Zheng, T. M. Wang, W. C. Hao, and R. Shen, “Improvement of photocatalytic activity of TiO2 thin film by Sn ion implantation,” Vacuum, vol. 65, no. 2, pp. 155–159, 2002. View at Publisher · View at Google Scholar · View at Scopus
  16. B. G. Streeetman and S. Banerjee, Solid State Electronics Devices, Prentice Hall, Upper Saddle River, NJ, USA, 5th edition, 2000.
  17. I. Nakamura, N. Negishi, S. Kutsuna, T. Ihara, S. Sugihara, and K. Takeuchi, “Role of oxygen vacancy in the plasma-treated TiO2 photocatalyst with visible light activity for NO removal,” Journal of Molecular Catalysis A, vol. 161, no. 1-2, pp. 205–212, 2000. View at Publisher · View at Google Scholar · View at Scopus
  18. P. Romero-Gomez, A. Palmero, F. Yubero, M. Vinnichenko, A. Kolitsch, and A. R. Gonzalez-Elipe, “Surface nanostructuring of TiO2 thin films by ion beam irradiation,” Scripta Materialia, vol. 60, no. 7, pp. 574–577, 2009. View at Publisher · View at Google Scholar · View at Scopus
  19. R. Asahi, T. Morikawa, T. Ohwaki, K. Aoki, and Y. Taga, “Visible-light photocatalysis in nitrogen-doped titanium oxides,” Science, vol. 293, no. 5528, pp. 269–271, 2001. View at Publisher · View at Google Scholar · View at PubMed · View at Scopus
  20. R. Knizikevicius, “Simulation of reactive sputter deposition of TiO2 films,” Materials Science, vol. 16, no. 3, pp. 202–204, 2010. View at Google Scholar
  21. C. Burda, Y. Lou, X. Chen, A. C. S. Samia, J. Stout, and J. L. Gole, “Enhanced nitrogen doping in TiO2 nanoparticles,” Nano Letters, vol. 3, no. 8, pp. 1049–1051, 2003. View at Publisher · View at Google Scholar · View at Scopus
  22. M. Xing, J. Zhang, and F. Chen, “New approaches to prepare nitrogen-doped TiO2 photocatalysts and study on their photocatalytic activities in visible light,” Applied Catalysis B, vol. 89, no. 3-4, pp. 563–569, 2009. View at Publisher · View at Google Scholar · View at Scopus
  23. P. G. Wu, C. H. Ma, and J. K. Shang, “Effects of nitrogen doping on optical properties of TiO2 thin films,” Applied Physics A, vol. 81, no. 7, pp. 1411–1417, 2005. View at Publisher · View at Google Scholar · View at Scopus
  24. N. Matsunami, M. Uebayashi, K. Hirooka, T. Shimura, and M. Tazawa, “N ion irradiation enhancement of photocatalytic activity of TiO2,” Nuclear Instruments and Methods in Physics Research, Section B, vol. 267, no. 8-9, pp. 1654–1657, 2009. View at Publisher · View at Google Scholar · View at Scopus
  25. W. Wagner, F. Rauch, and K. Bange, “Concentration profiles of hydrogen in technical oxidic thin films and multilayer systems,” Fresenius' Zeitschrift für Analytische Chemie, vol. 333, no. 4-5, pp. 478–480, 1989. View at Publisher · View at Google Scholar · View at Scopus